榪戞湡錛屽搱灝?dāng)婊ㄥ伐涓氬ぇ瀛﹂檲绁栫厡鏁欐巿鍥㈤槦锛岄氳繃鐭╅樀縐戞妧鑴夊啿嬋鍏夋矇縐郴緇熷埗澶囧嚭楂樿川閲忓弽閾佺數(shù)PbZrO3澶栧歡钖勮啘鏉愭枡銆愬疄楠屼腑錛孭bZrO3銆?/span>SrRuO3澶栧歡钖勮啘鐢辯煩闃電鎶PLD錛堝瀷鍙鳳細(xì)RP-B錛夊埗澶囷紝Pt鐢墊瀬鏉愭枡鐢辯煩闃電鎶紓佹帶婧呭皠緋葷粺錛堝瀷鍙稲S-M錛夊埗澶囥戯紝鍏鋒湁楂樺姣斿害錛?/span>>2.2錛夈侀珮閫燂紙<150綰崇錛夈佷互鍙?qiáng)鍦ㄤ綆鐢?shù)鍘嬶紙<10 V錛変笅闀垮鍛斤紙>107錛夌殑鐑垏鎹€傜爺絀跺洟闃熸彁鍑哄埄鐢ㄥ弽閾佺數(shù)鏉愭枡涓數(shù)鍦鴻瀵煎弽閾佺數(shù)-閾佺數(shù)鐩稿彉鍙皟鎺т袱鐩稿師鑳?yōu)澶畯锛屽疄鐜板鐩稿彉鍓嶅悗瀵肩儹绯绘暟鐨勫ぇ骞呭彲閫嗚皟鎺с傚叿浣撹岃█錛屾湭鍔犵數(shù)鍦烘椂PbZrO3涓烘浜ゅ弽閾佺數(shù)鐩革紝鏅舵牸鍐呮湁鍙嶅鉤琛岀殑鏋佸寲錛岀粨鏋勫鏉傦紝鍘熻優(yōu)鍐呭師瀛愭暟澶氾紱鏂藉姞瓚沖寮虹殑鐢?shù)鍦烘椨灱屽弽閾佺數(shù)鍦ㄧ數(shù)鍦鸿瀵间笅铦{鍙樹(shù)負(fù)鑿辨柟閾佺數(shù)鐩革紝閾佺數(shù)鐩稿師鑳?yōu)鍐呭師瀛愭暟鍑彏畱锛涙挙閿鐢?shù)鍦哄悗锛屾櫠鏍季l撴瀯浼?xì)鎭㈠鍒拌捣鍒濈殑鍙嶉搧鐢?shù)鐩革紱渚濇嵁鍔ㄥ姏瀛︾悊璁猴紝澹板瓙-澹板瓙鏁ｅ皠涓庡師鑳?yōu)鍐呭師瀛愭暟鏈夊緢寮虹殑渚濊禆鎬э紝鏁呭弽閾佺數(shù)-閾佺數(shù)鐩稿彉鑳藉鍙嗚皟鎺у鐑郴鏁幫紝瀹炵幇鐑紑鍏崇殑鍔熻兘銆傝鐑紑鍏沖姛鑳界殑瀹炵幇浠呴渶鎵撳紑鎴栧叧闂閮ㄧ數(shù)鍦猴紝娌℃湁縐誨姩閮ㄤ歡錛屾湁鍔╀簬灝嗗叾涓庡叾浠栫郴緇熼泦鎴愩傜爺絀朵漢鍛樼殑榪欎簺鍙戠幇鏈夋湜鎺ㄨ繘瀵癸紙鍙嶏級(jí)閾佺數(shù)浣撲腑澹板瓙鐑緭榪愮殑鐞嗚В錛屽茍涓哄疄鐜頒富鍔ㄦ帶鍒剁儹浼犲鎻愪緵浜?jiǎn)涓縐嶉珮鏁堟柟娉曘?/span>
搴熺儹鐨勫洖鏀跺拰綆＄悊瀵逛簬鑺傝兘鍜屽噺灝戠⒊鎺掓斁鑷沖叧閲嶈錛堜笘鐣屼笂綰?/span>60%鐨勮兘婧愪互鐑兘鐨勫艦寮忔氮璐癸級(jí)錛岃鍋氬埌榪欑偣錛岄渶瑕佹湁鏁堝埄鐢ㄤ綑鐑紝涓誨姩鎺у埗鐑兘浼犻掋傜儹鑳界殑浼犲涓昏鏉ユ簮浜庢櫠鏍肩殑澹板瓙錛?/span>鍒扮洰鍓嶄負(fù)姝紝瀵瑰０瀛愯緭榪愭垨鐑鐜?/span>k鐨勪富鍔ㄥ拰鍙嗘帶鍒訛紙鍗崇儹鍒囨崲錛夊凡鎺㈢儲(chǔ)鍑?guó)櫘稿涓嶅悓鐨勬栆?guī)硶錛氳弻鏍伐紼嬨佸垎瀛愰摼鐨勫厜瑙﹀彂鎺掑垪銆佺數(shù)鍖栧鎺у埗鐩稿彉鎴栫瀛愭彃灞傘佹俯搴﹀紩鍙戠殑鐩稿彉銆?/span>鐢?shù)鍦洪┍鍔ń{夈傚浜庡疄闄呭簲鐢紝楂樻ц兘鐑垏鎹㈠簲婊¤凍涓変釜鍏抽敭鏉′歡錛氾紙1錛夐珮寮鍏蟲瘮錛岋紙2錛夊ぇ閲忓紑鍏沖懆鏈燂紝錛?錛夊紑鍏蟲椂闂寸煭銆傚敖綆″鐑紑鍏蟲柟娉曡繘琛屼簡(jiǎn)騫挎硾鐨勭爺絀訛紝浣嗗湪鍚勭鏉愭枡涓紝寰堥毦鎵懼埌鑳芥弧瓚蟲墍鏈夎繖涓変釜鍩烘湰瑕佹眰鐨勬潗鏂欍傞搧鐢?shù)浣撴潗鏂欏洜鍏跺彲璋冪殑缁撴瀯鑰屾湁鏈涙垚涓虹儹寮鍏崇殑鍊欓夋潗鏂欙紝鐒惰岋紝鍦ㄥ父娓╂潯浠朵笅錛屽父瑙勯搧鐢墊潗鏂?/span>鐨勮漿鎹㈢巼寰堜綆錛?/span><1.2錛夈?/span>
璇ョ爺絀舵垚鏋滀互鈥?/span>Low voltage-driven high performance thermal switching in antiferroelectric PbZrO3 thin films鈥濆彂琛ㄥ湪銆奡cience銆嬫湡鍒婁笂銆傝鏂囩殑絎竴浣滆呬負(fù)鍗椾含甯堣寖澶у鍒樻櫒鏅楀壇鏁欐巿銆佸搱灝?dāng)婊ㄥ伐涓氬ぇ瀛﹀Q堟繁鍦籌級(jí)鍗氬＋鐮旂┒鐢熷徃媧嬫磱鍜屼笢鍗楀ぇ瀛﹀崥澹爺絀剁敓寮犲崕銆傝鏂囩殑閫氳浣滆呬負(fù)鍝堝皵婊ㄥ伐涓氬ぇ瀛︼紙娣卞湷錛夐檲紲栫厡鏁欐巿鍜屼笢鍗楀ぇ瀛﹂檲浜戦鏁欐巿銆?/span>
鍥句竴錛歅ZO鐑紑鍏崇ず鎰忓浘鍙?qiáng)鏈虹?/strong>
鍥句簩錛氱煩闃電鎶PLD娌夌Н鐨勫崟鏅禤ZO钖勮啘鐗規(guī)ц〃寰?/strong>
琛ュ厖鏉愭枡
鐭╅樀縐戞妧鑴夊啿嬋鍏夋矇縐郴緇?nbsp;RP-B
鐭╅樀縐戞妧紓佹帶婧呭皠緋葷粺 RS-M
娣卞湷甯?jìng)鐭╅樀澶氬厓绉戞妧鏈夐檺鍏徃錛堢煩闃電鎶錛夋槸涓瀹朵笓娉ㄤ簬鍗婂浣撹杽鑶滄潗鏂欏埗澶囪澶囩殑鍥藉綰ч珮鏂版妧鏈紒涓氥傚叕鍙告牳蹇?jī)鍥㈤槦鎴愬憳鏉ヨ嚜缇庡?/span>Applied Materials銆乄estern Digital錛屾棩鏈琓EL絳夊浗闄呯煡鍚嶅崐瀵間綋棰嗗煙鍏徃鍜屽鎵嫻峰欏剁駭楂樻牎鎴栧浗瀹跺疄楠屽錛屾嫢鏈夋暟鍗佸勾鍗婂浣撳伐鑹鴻澶囧紑鍙戝強(qiáng)鏉愭枡鐮斿彂緇忛獙銆?/span>
鍏徃涓昏惀浜у搧鍖呮嫭鑴夊啿嬋鍏夋矇縐紙PLD錛夈佺鎺ф簠灝勶紙PVD錛夈佺數(shù)瀛愭潫钂稿彂錛圗BM錛夈佸垎瀛愭潫澶栧歡錛圡BE錛夈佺瓑紱誨瓙浣撳寮哄寲瀛︽皵鐩告矇縐紙PECVD錛夌瓑鍗婂浣撹杽鑶滃埗澶囩郴緇燂紝浠ュ強(qiáng)閮ㄥ垎钖勮啘鍒跺緋葷粺鏍稿績(jī)闆墮儴浠訛紝騫挎硾搴旂敤浜庤姱鐗囬噺浜у強(qiáng)鍗婂浣撴潗鏂欑爺鍙戦鍩熴?/span>
鐭╅樀縐戞妧鑱氱劍鍗婂浣撹澶囨牳蹇?jī)宸ヨ壓鎶鏈強(qiáng)鍘熷垱璁捐錛屼互鎵撻犲浗浜ч珮绔埗閫犱負(fù)浣垮懡錛屽姫鍔涗負(fù)涓浗鍗婂浣撲駭涓氬崌綰ц屽姫鍔涳紒
